MSE 564
spring 2005
All Classes
Vapor Phase Thin Film Growth
Credit: 4 hours.
(MATSE 464) Introduction to atomic level processes occurring during vapor phase film growth. Quantitative consideration of growth mechanisms and microstructure evolution of films based on experimental results from atomic level probes, modeling and simulation. Prerequisite: MSE 500, 501, and a graduate course in solid state physics; or equivalent background. Recommended: MSE 582 or CHBE 553.

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