MSE 462

Credit: 3 hours.

(MATSE 362) Introduces seniors and new graduate students to the fabrication, analysis, and properties of thin film materials through a combination of lectures and experiments. Covers both the principles and practice of; (i) deposition of thin film materials by vacuum evaporation, sputtering and plasma assisted processes; (ii) modification of properties by thermal reaction, surface treatment, etc. ; and (iii) characterization of key properties including electrical conductivity, optical properties and stress. Methods to optimize the film microstructure and engineering properties via growth techniques are emphasized.

Prerequisite: Concurrent registration in MSE 460 or consent of instructor.

Register for the Lecture, one Lab and one Lbd section.