ME 586

fall 2017

All Classes

Mechanics of MEMS

Credit: 4 hours.

Mechanics and dynamics of microelectromechanical systems (MEMS); scaling laws in electrostatics, magnetics, and fluidics; analytical models for thin-film growth and etching; effect of surface tension in small dimensions in relations to stability of MEMS during web fabrication; size effects on mechanical properties of MEMS materials; equations of motion for MEMS, involving coupled elastic and electric fields that give rise to nonlinear dynamical behavior; Mathieu behavior and chaotic systems.

Prerequisite: ME 485.

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