ME 487

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Credit: 4 hours.

Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.

4 undergraduate hours. 4 graduate hours. Prerequisite: PHYS 212.

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