ME 586

Fall 2026 Part of Term 1

Part of Term 1
Aug 24-Dec 9

Mechanics of MEMS

Credit: 4 hours.

Mechanics and dynamics of microelectromechanical systems (MEMS); scaling laws in electrostatics, magnetics, and fluidics; analytical models for thin-film growth and etching; effect of surface tension in small dimensions in relations to stability of MEMS during web fabrication; size effects on mechanical properties of MEMS materials; equations of motion for MEMS, involving coupled elastic and electric fields that give rise to nonlinear dynamical behavior; Mathieu behavior and chaotic systems.

Prerequisite: ME 485.

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ME 586 class schedule data for fall 2026
	Status		CRN	Type	Section	Time	Day	Location	Instructor	Section Details
			66183	Lecture-Discussion	A1	10:00AM -11:50AM	MW	ARR Sidney Lu Mech Engr Bldg	Saif, M	Availability: Open (Restricted) Part of Term: 1 Date Range: 08/24/26-12/09/26 Section Info: This class will meet in 2043 LUMEB. Restriction(s): Restricted to Graduate - Urbana-Champaign.