ME 487

Fall 2026 Part of Term 1

Part of Term 1
Aug 24-Dec 9

MEMS-NEMS Theory & Fabrication

Credit: 4 hours.

Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.

4 undergraduate hours. 4 graduate hours. Prerequisite: PHYS 212.

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ME 487 class schedule data for fall 2026
CRN	Type	Section	Time	Day	Location	Instructor	Section Details
55927	Laboratory	ABA	8:00AM -10:50AM	F	2208 Sidney Lu Mech Engr Bldg		Availability: Closed Part of Term: 1 Date Range: 08/24/26-12/09/26
55926	Laboratory	ABB	2:00PM -4:50PM	F	2208 Sidney Lu Mech Engr Bldg		Availability: Closed Part of Term: 1 Date Range: 08/24/26-12/09/26
55928	Laboratory	ABC	3:00PM -5:50PM	R	2208 Sidney Lu Mech Engr Bldg		Availability: Closed Part of Term: 1 Date Range: 08/24/26-12/09/26
67800	Lecture	ALG	3:00PM -4:20PM	MW	2051 Sidney Lu Mech Engr Bldg	Mensing, G	Availability: Closed Part of Term: 1 Date Range: 08/24/26-12/09/26 Restriction(s): Restricted to Graduate - Urbana-Champaign.
55925	Lecture	ALU	3:00PM -4:20PM	MW	2051 Sidney Lu Mech Engr Bldg	Mensing, G	Availability: Closed Part of Term: 1 Date Range: 08/24/26-12/09/26 Restriction(s): Restricted to students with Senior class standing. Restricted to Undergrad - Urbana-Champaign.