ME 586
Fall 2022 All Classes
Credit: 4 hours.
Mechanics and dynamics of microelectromechanical systems (MEMS); scaling laws in electrostatics, magnetics, and fluidics; analytical models for thin-film growth and etching; effect of surface tension in small dimensions in relations to stability of MEMS during web fabrication; size effects on mechanical properties of MEMS materials; equations of motion for MEMS, involving coupled elastic and electric fields that give rise to nonlinear dynamical behavior; Mathieu behavior and chaotic systems.
Prerequisite: ME 485.
| CRN | Type | Section | Time | Day | Location | Instructor | Section Details | |
|---|---|---|---|---|---|---|---|---|
|
66183
|
Lecture-Discussion
|
A1
|
10:00AM
-11:50AM
|
MW
|
Sidney Lu Mech Engr Bldg
|
Saif, M
|
|