ME 487

Spring 2021 Part of Term 1

Part of Term 1
Jan 25-May 5

MEMS-NEMS Theory & Fabrication

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Credit: 4 hours.

Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.

4 undergraduate hours. 4 graduate hours. Prerequisite: PHYS 212.

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ME 487 class schedule data for spring 2021
CRN	Type	Section	Time	Day	Location	Instructor	Section Details
52253	Laboratory	ABA	8:00AM -10:50AM	F	Mechanical Engineering Bldg	Das, P	Part of Term: 1 Date Range: 01/25/21-05/05/21
52254	Laboratory	ABB	2:00PM -4:50PM	F	Mechanical Engineering Bldg	Mahmud, R	Part of Term: 1 Date Range: 01/25/21-05/05/21
52255	Laboratory	ABC	3:00PM -5:50PM	R	Mechanical Engineering Bldg	Vishwanathan, G	Part of Term: 1 Date Range: 01/25/21-05/05/21
62687	Online Lecture	OLG	9:30AM -10:50AM	TR	n.a.	Bahl, G	Part of Term: 1 Date Range: 01/25/21-05/05/21 Restriction(s): Restricted to Graduate - Urbana-Champaign.
52252	Online Lecture	OLU	9:30AM -10:50AM	TR	n.a.	Bahl, G	Part of Term: 1 Date Range: 01/25/21-05/05/21 Restriction(s): Restricted to Undergrad - Urbana-Champaign.