NPRE 527

Fall 2020 All Classes

All Classes

Plasma Technology of Gaseous Electronics

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Credit: 4 hours.

This course will help students to develop an advanced theoretical understanding of Low-Temperature Plasma (LTP) processing systems, with an emphasis on system design. Whereas prerequisite coursework focused on developing a framework for the analysis of LTP systems, in this course students will build upon that foundation to develop more advanced theoretical models for LTP dynamics, including electron collisions, plasma transport, sheath dynamics, and plasma and surface chemistry. Students will be able to apply this advanced LTP theory for the design of systems for etching, advanced deposition, and others important in modern materials processing applications.

Same as ECE 523. 4 graduate hours. No professional credit. Prerequisite: ECE 452 or PHYS 485 or NPRE 429.

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NPRE 527 class schedule data for fall 2020
	CRN	Type	Section	Time	Day	Location	Instructor	Section Details
	74038	Lecture-Discussion	A	1:00PM -2:50PM	MW	1302 Siebel Center for Comp Sci	Ruzic, D	Part of Term: 1 Date Range: 08/24/20-12/09/20 Restriction(s): Restricted to Graduate - Urbana-Champaign.
	75524	Online	ONL	ARRANGED	n.a.	n.a.	Ruzic, D	Part of Term: 1 Date Range: 08/24/20-12/09/20 Section Info: This online section is intended for students who are not able to attend in person due to COVID-19. Please contact the NPRE Undergraduate Programs Office staff for an override. Restriction(s): Restricted to Graduate - Urbana-Champaign.