CHBE 457
fall 2018
All Classes
Microelectronics Processing
Credit: 3 hours.
Introductory survey of chemical processing principles applied to microelectronic fabrication. Key concepts originate from chemical kinetics; thermodynamics; mass and energy balances; transport of mass, momentum and heat; and process synthesis and integration.
3 undergraduate hours. 3 graduate hours. Prerequisite: Junior or senior standing in Chemical and Biomolecular Engineering, Electrical and Computer Engineering, or Materials Science and Computer Engineering.
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