ECE 485

Fall 2013 Part of Term 1

Part of Term 1
Aug 26-Dec 11

MEMS Devices & Systems

Credit: 3 hours.

Introduction to principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). In-depth analysis of sensors, actuator principles, and integrated microfabrication techniques for MEMS. Comprehensive investigation of state-of-the-art MEMS devices and systems.

Same as ME 485.

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ECE 485 class schedule data for fall 2013
	CRN	Type	Section	Time	Day	Location	Instructor	Section Details
	36987	Lecture	C	9:30AM -10:50AM	TR	Everitt Laboratory	Liu, G	Part of Term: 1 Date Range: 08/26/13-12/11/13 Credit: 3 hours