ME 487

Spring 2012 All Classes

All Classes

MEMS-NEMS Theory & Fabrication

Credit: 4 hours.

Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.

Prerequisite: PHYS 212.

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ME 487 class schedule data for spring 2012
CRN	Type	Section	Time	Day	Location	Instructor	Section Details
52253	Laboratory	ABA	8:00AM -10:50AM	F	Mechanical Engineering Bldg	Mensing, G	Part of Term: 1 Date Range: 01/17/12-05/02/12
52254	Laboratory	ABB	2:00PM -4:50PM	F	Mechanical Engineering Bldg	Mensing, G	Part of Term: 1 Date Range: 01/17/12-05/02/12
52255	Laboratory	ABC	3:00PM -5:50PM	R	Mechanical Engineering Bldg	Mensing, G	Part of Term: 1 Date Range: 01/17/12-05/02/12
52252	Lecture	AL1	9:30AM -10:50AM	TR	Mechanical Engineering Bldg	Mensing, G	Part of Term: 1 Date Range: 01/17/12-05/02/12