ME 487

Fall 2012 Part of Term 1

Part of Term 1
Aug 27-Dec 12

MEMS-NEMS Theory & Fabrication

Credit: 4 hours.

Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.

Prerequisite: PHYS 212.

My Favorites

My Schedule

Section Status updates every 10 minutes.

ME 487 class schedule data for fall 2012
CRN	Type	Section	Time	Day	Location	Instructor	Section Details
55927	Laboratory	ABA	8:00AM -10:50AM	F	Mechanical Engineering Bldg	Vilasur Swaminathan, V Ahmed, N	Part of Term: 1 Date Range: 08/27/12-12/12/12
55926	Laboratory	ABB	2:00PM -4:50PM	F	Mechanical Engineering Bldg	Kim, J Ahmed, N	Part of Term: 1 Date Range: 08/27/12-12/12/12
55928	Laboratory	ABC	3:00PM -5:50PM	R	Mechanical Engineering Bldg	Vilasur Swaminathan, V Kim, J	Part of Term: 1 Date Range: 08/27/12-12/12/12
55925	Lecture	AL1	3:00PM -4:20PM	MW	Transportation Building	Mensing, G	Part of Term: 1 Date Range: 08/27/12-12/12/12