MSE 462

spring 2011

All Classes

Electronic Materials Lab

Credit: 3 hours.

Fabrication, analysis, and properties of thin film materials. Principles and practice of (i) deposition of thin film materials by vacuum evaporation, sputtering and plasma assisted processes; (ii) modification of properties by thermal reaction, surface treatment, etc.; (iii) characterization of key properties including electrical conductivity, optical properties, and stress. Methods to optimize the film microstructure and engineering properties via growth techniques. Prerequisite: Credit or concurrent registration in MSE 460.

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