ME 487
Spring 2011 All Classes
All Classes
Credit: 4 hours.
Physical and chemical theory, design, and hands-on fabrication of micro- and nano-electromechanical systems (MEMS and NEMS); cleanroom fabrication theory, including general cleanroom safety, lithography, additive and subtractive processes, bulk and surface micromachining, deep reactive ion etching (DRIE), lithographic Galvanoformung Abformung (LIGA), packaging, scaling, actuators, and micro-nanofluids; fabrication of two take-home devices, such as piezoresistive sensors and microfluidic logic chips, that demonstrate advanced fabrication processing.
Prerequisite: PHYS 212.
Section Status updates every 10 minutes.
| CRN | Type | Section | Time | Day | Location | Instructor | Section Details | |
|---|---|---|---|---|---|---|---|---|
|
52253
|
Laboratory
|
ABA
|
8:00AM
-10:50AM
|
F
|
Mechanical Engineering Bldg
|
Sawyer, A
|
|
|
|
52254
|
Laboratory
|
ABB
|
2:00PM
-4:50PM
|
F
|
Mechanical Engineering Bldg
|
Azeredo, B
|
|
|
|
52255
|
Laboratory
|
ABC
|
3:00PM
-5:50PM
|
R
|
Mechanical Engineering Bldg
|
Lee, K
|
|
|
|
52252
|
Lecture
|
AL1
|
9:30AM
-10:50AM
|
TR
|
Mechanical Engineering Bldg
|
Mensing, G
|
|