ECE 510

Fall 2010 All Classes

All Classes

Credit: 4 hours.

A comprehensive foundation in the broad field of micro and nanolithography, including the science of optical imaging, photochemistry, and materials issues; technological developments including state-of-the-art commercial lithography systems; applications of micro and nanolithography to diverse fields, including semiconductor devices, displays, flexible electronics, microelectromechanical systems, and biotechnology.

Prerequisite: One of ECE 444, ECE 460, MSE 462, NPRE 429, PHYS 402.

ECE 510 class schedule data for fall 2010
CRN Type Section Time Day Location Instructor Section Details
53799
Lecture
A
11:00AM -12:20PM
TR
Everitt Laboratory
Jain, K
Part of Term:
1
Date Range:
08/23/10-12/08/10
Credit:
4 hours
Restriction(s):
Restricted to Graduate - Urbana-Champaign.
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