MSE 462

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Credit: 3 hours.

Introduces the fabrication, analysis, and properties of thin film materials through a combination of lectures and experiments. Covers both the principles and practice of (i) deposition of thin film materials by vacuum evaporation, sputtering and plasma assisted processes; (ii) modification of properties by thermal reaction, surface treatment, etc.; (iii) characterization of key properties including electrical conductivity, optical properties, and stress. Emphasizes methods to optimize the film microstructure and engineering properties via growth techniques. Prerequisite: Credit or concurrent registration in MSE 460.

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